A full rebuild for heaters includes:
- full inspection of entire heater
- replacement of bellows, element, wires, thermocouples
- complete re-polish and cleaning
- continuity and resistance testing
- polish and clean
- full certifications
A partial rebuild includes:
- replacement of bellows
- continuity and resistance testing
- polish and clean
- full certifications
Partial List of Refurbished Heater Parts:
0010-04450 - E-Chuck Heater
0010-12516 - E-Chuck Heater
0010-22411 - 8" E-Chuck Heater
0010-76152 - 8" HTHU
0010-76149 - 6" HTHU
0010-13626 - 8" Advanced B101
0010-25735 - 8" Advanced B101
0010-13625 - 6" Advanced B101
0010-21530 - 6" Advanced A101
0010-21246 - 8" Advanced A101
0010-21146 - 8" Special Pre-Heater Heater
0010-70252 - 6" VCR with 2 T/C's (4 finger)
0010-70254 - 8" VCR with 2 T/C's (4 Finger)
0010-22012 - 8" Hi Temp w/ welded lugs (6 Finger)
0010-22260 - 6" Hi Temp w/ welded lugs (6 Finger)
0010-20391 - 6" Hi Temp PVD Degas (6 Finger)
0010-21356 - 8" VCR w/ shielded bellows
0010-20159 - 5" 4 Finger VCR
Bellows Repairs:
0040-20068 - Bellows Lifter PVD
0040-20155 - Bellows Preclean
0040-20194 - Bellows
0010-27432 - 300mm A101
0010-15418 - 300mm A101
This is a partial list, please inquire about additional repairs.
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